Customization: | Available |
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CAS No.: | 7440-37-1 |
Formula: | Ar |
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Specification
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Tank Car:26m³ Content: 28tons
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Application
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1. used as a protective gas for the production of high purity silicon and germanium crystals in the semiconductor industry;
2.used as inert gas for system cleaning, shielding and pressurization;
3. Be applied in chemical vapor deposition, sputtering, annealing and other processes.
4. used as chromatographic carrier gas, and can also be used as a dilution gas of gas mixture in large-scale integrated circuits.
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